Department of Engineering

EGN 446

Micro Electromechanical Systems

Course Description: Topics include microfabrication, principles of electromechanical energy conversion and transduction, sensors and actuators, materials used for MEMS and their thermal, electrical, and mechanical properties. Standard MEMS fabrication processes and MEMS design.

Curriculum: Electrical or mechanical engineering elective
Prerequisites: EGN 260, ELE 217 or instructor permission
Instructors: Mustafa Guvench
Delivery: Lecture 3 hrs., Lab 1 hr.
Frequency: Spring, even year (see the Course Offering Plan)
Credits: 3